Compensation effect during water desorption from siloxane-based spin-on dielectric thin films

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 18, Issue 1, 2000, Pages 303-306

  Proost, J ^a   Baklanov, M ^a   Maex, K ^a   Delaey, L ^b  

^a IMEC   (Belgium)

^b NONE

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; DESORPTION; ENTHALPY; ENTROPY; FUSED SILICA; KINETIC THEORY; THERMODYNAMIC STABILITY; THIN FILMS; WATER;

ARRHENIUS PARAMETERS; COMPENSATION EFFECT; ISOKINETIC TEMPERATURE; WATER DESORPTION;

DIELECTRIC FILMS;

EID: 0033715180     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.591189     Document Type: Article

References (8)

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