SCOPUS 정보 검색 플랫폼

Volumn 5, Issue 12, 2002, Pages

Determination of Young's modulus of porous low-k films by ellipsometric porosimetry

a IMEC (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

BRILLOUIN SCATTERING; ELASTIC MODULI; ELLIPSOMETRY; POROUS MATERIALS;

ELLIPSOMETRIC POROSIMETRY (EP);

THIN FILMS;

EID: 0036897565 PISSN: 10990062 EISSN: None Source Type: Journal
DOI: 10.1149/1.1517771 Document Type: Article

Times cited : (109)

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