Thermal conductivity study of porous low-k dielectric materials

Applied Physics Letters

Volumn 77, Issue 1, 2000, Pages 145-147

  Hu, Chuan ^a   Morgen, Michael ^a   Ho, Paul S ^a   Jain, Anurag ^b   Gill, William N ^b   Plawsky, Joel L ^b   Wayner Jr , Peter C ^b  

^a The University of Texas at Austin   (United States)

^b RENSSELAER POLYTECHNIC INSTITUTE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001670972     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.126904     Document Type: Article

References (10)

1. W. W. Lee and P. S. Ho, MRS Bull. 22, 19 (1997).
2. C. Hu, M. Morgen, P. S. Ho, A. Jain, W. Gill, J. Plawsky, and P. Wayner, Mater. Res. Soc. Symp. Proc. 565, 87 (1999).
3. M. Kaviany, Principles of Heat Transfer in Porous Media (Springer, New York, 1991).
4. X. Lu, O. Nilsson, J. Fricke, and R. W. Pekala, J. Appl. Phys. 73, 581 (1993).
5. N. O. Birge and S. R. Nagel, Rev. Sci. Instrum. 58, 1464 (1987).
6. D. G. Cahill and T. H. Allen, Appl. Phys. Lett. 65, 309 (1994).
7. K. E. Goodson, M. I. Flik, I. T. Su, and D. A. Antoniadis, IEEE Electron Device Lett. 14, 490 (1993).
8. O. W. Kading, H. Skurk, and K. E. Goodson, Appl. Phys. Lett. 65, 1629 (1994).
9. C. Hu, E. Ogawa, M. Hay, and P. S. Ho, Mater. Res. Soc. Symp. Proc. 511, 151 (1998).
10. R. M. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (Elsevier, Amsterdam, 1977).