Nanoporous silica as an ultralow-k dielectric

MRS Bulletin

Volumn 22, Issue 10, 1997, Pages 39-42

  Jin, Changming ^a   Luttmer, J D ^a   Smith, Douglas M ^a   Ramos, Teresa A ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC PROPERTIES; INTEGRATED CIRCUIT MANUFACTURE; PERMITTIVITY; POROSITY; POROUS MATERIALS; SILICA; STRENGTH OF MATERIALS;

NANOPOROUS SILICA; ULTRALOW DIELECTRICS;

DIELECTRIC FILMS;

EID: 0031256186     PISSN: 08837694     EISSN: None     Source Type: Journal    
DOI: 10.1557/s0883769400034187     Document Type: Article

References (14)

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12. Patents pending.
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