Frequency dependence in interline capacitance measurements

IEEE Transactions on Instrumentation and Measurement

Volumn 51, Issue 3, 2002, Pages 537-543

  Stucchi, Michele ^a   Maex, Karen ^a  

^a IMEC   (Belgium)

Author keywords

Capacitance model; Cut off frequency; IC interconnects; Interline capacitance; LCR meter; RC ladder model

Indexed keywords

COMPUTER SIMULATION; DIELECTRIC MATERIALS; ELECTRIC INSULATORS; INSULATING MATERIALS; MASKS; PERMITTIVITY; RESISTORS;

FREQUENCY DEPENDENCE; INTERLINE CAPACITANCE MEASUREMENT;

CAPACITANCE MEASUREMENT;

EID: 0036612425     PISSN: 00189456     EISSN: None     Source Type: Journal    
DOI: 10.1109/TIM.2002.1017725     Document Type: Article

References (9)

1. International technology roadmap for semiconductor
2. Modeling of interconnect capacitance, delay and crosstalk in VLSI
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4. Low-dielectric-constant materials for ULSI interlayer-dielectric applications
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6. LCR/impedance measurement basics
7. Basics of measuring the dielectric properties of materials