Determination of pore-size distribution in low-dielectric thin films

Applied Physics Letters

Volumn 76, Issue 10, 2000, Pages 1282-1284

  Gidley, D W ^a   Frieze, W E ^a   Dull, T L ^a   Sun, J ^a   Yee, A F ^a   Nguyen, C V ^b   Yoon, D Y ^c  

^a UNIVERSITY OF MICHIGAN   (United States)

^b IBM ALMADEN RESEARCH CENTER   (United States)

^c Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001076418     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.126009     Document Type: Article

References (11)

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