A review of MEMS oscillators for frequency reference and timing applications

Journal of Micromechanics and Microengineering

Volumn 22, Issue 1, 2012, Pages

  Van Beek, J T M ^a   Puers, R ^b  

^a NXP SEMICONDUCTORS   (Netherlands)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVE RESONATORS; CMOS TECHNOLOGY; ELECTRICAL PERFORMANCE; FREQUENCY DRIFTS; FREQUENCY REFERENCE; MEMS OSCILLATORS; MEMS RESONATORS; OSCILLATOR NOISE; PERFORMANCE INDICATORS; TEMPERATURE-INDUCED; TRANSDUCTION METHOD;

BENCHMARKING; CMOS INTEGRATED CIRCUITS; FREQUENCY STABILITY; QUARTZ; RESONATORS;

MICROELECTROMECHANICAL DEVICES;

EID: 84855764763     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/22/1/013001     Document Type: Article

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