Hydrogen diffusion and pressure control of encapsulated mems resonators

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 1, Issue , 2005, Pages 920-923

  Candler, Rob N ^a   Park, Woo Tae ^a   Hopcroft, Matt ^a   Kim, Bongsang ^a   Kenny, Thomas W ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

Hermetic packaging; Hydrogen diffusion; Quality factor; Resonator

Indexed keywords

HERMETIC PACKAGING; HYDROGEN DIFFUSION; QUALITY FACTOR; VACUUM PACKAGE;

DIFFUSION IN GASES; ELECTRONICS PACKAGING; ENCAPSULATION; HYDROGEN; PRESSURE CONTROL; RESONATORS; SILICON; VACUUM;

MICROELECTROMECHANICAL DEVICES;

EID: 27544502546     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2005.1496568     Document Type: Conference Paper

References (8)

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