Capacitive-piezoelectric ALN resonators with q>12,000

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2011, Pages 173-176

  Hung, Li Wen ^a   Nguyen, Clark T C ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALN; ALN RESONATORS; COGNITIVE RADIO; ELECTRODE LOSS; ENERGY LOSS; GLASS DISKS; IN-CHANNELS; MATERIAL LOSS; PIEZOELECTRIC RESONATORS; RESONATOR ARRAYS; RF FRONT END; SMALL GAPS;

ELECTRODES; ELECTROMECHANICAL COUPLING; ENERGY DISSIPATION; MECHANICAL ENGINEERING; MECHANICS; MEMS; PIEZOELECTRICITY; REACTIVE ION ETCHING; RESONATORS; WINE;

ELECTROMECHANICAL DEVICES;

EID: 79953781054     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2011.5734389     Document Type: Conference Paper

References (12)

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