Post-fabrication electrical trimming of silicon bulk acoustic resonators using Joule heating

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2009, Pages 892-895

  Samarao, A K ^a   Ayazi, F ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRICAL CALIBRATIONS; FREQUENCY SHIFT; GOLD PATTERN; MASS LOADINGS; POST-FABRICATION; PROOF OF CONCEPT; RESONANCE FREQUENCIES; RESONATING ELEMENTS; RESONATING STRUCTURES; SILICON BULK ACOUSTIC RESONATORS; SILICON RESONATORS;

ACOUSTICS; HEATING; JOULE HEATING; NATURAL FREQUENCIES; RESONATORS;

ACOUSTIC RESONATORS;

EID: 65949086820     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2009.4805527     Document Type: Conference Paper

References (12)

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