Enhanced power handling and quality factor in thin-film piezoelectric-on-substrate resonators

Proceedings - IEEE Ultrasonics Symposium

Volumn , Issue , 2007, Pages 608-611

  Abdolvand, Reza ^a,b   Ayazi, Farrokh ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b OKLAHOMA STATE UNIVERSITY   (United States)

Author keywords

Oscillator; Power handling; Quality factor; Thin film piezoelectric

Indexed keywords

IN-VACUUM; OSCILLATOR; POWER HANDLING; QUALITY FACTOR; SILICON RESONATORS; THIN-FILM PIEZOELECTRIC;

NONMETALS; PIEZOELECTRICITY; Q FACTOR MEASUREMENT; RESONATORS; SILICON; THIN FILM DEVICES; ULTRASONICS;

POWER QUALITY;

EID: 48149099586     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2007.158     Document Type: Conference Paper

References (8)

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