Temperature measurement and compensation based on two vibrating modes of a bulk acoustic mode microresonator

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2008, Pages 78-81

  Koskenvuori, M ^a   Kaajakari, V ^b,c   Mattila, T ^b   Tittonen, I ^a  

^a AALTO UNIVERSITY   (Finland)

^b VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

^c LOUISIANA TECH UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTICS; COMPOSITE MICROMECHANICS; LATTICE VIBRATIONS; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; REACTIVE ION ETCHING; SENSORS; TEMPERATURE MEASUREMENT; VIBRATIONS (MECHANICAL);

ACOUSTIC MODES; EIGEN-MODES; EXTERNAL TEMPERATURE; FREQUENCY CHANGES; FUNDAMENTAL MODES; IN-SITU TEMPERATURES; INTERNATIONAL CONFERENCES; MICRO RESONATORS; MICRO-ELECTRO MECHANICAL SYSTEMS; MICRO-MECHANICAL RESONATORS; TEMPERATURE CO-EFFICIENT; TEMPERATURE INDUCED; TEMPERATURE INFORMATION; TEMPERATURE-TIME; VIBRATING MODES;

RESONATORS;

EID: 50149084940     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2008.4443597     Document Type: Conference Paper

References (10)

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