Square-extensional mode single-crystal silicon micromechanical resonator for low-phase-noise oscillator applications

IEEE Electron Device Letters

Volumn 25, Issue 4, 2004, Pages 173-175

  Kaajakari, Ville ^a   Mattila, Tomi ^a   Oja, Aarne ^a   Kiihamäki, Jyrki ^a   Seppä, Heikki ^a  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

Bulk acoustic wave devices; Microresonators; Oscillator noise; Oscillators; Phase noise; Resonators; Silicon on insulator (SOI) technology

Indexed keywords

ACOUSTIC BULK WAVE DEVICES; ACOUSTIC WAVES; ELECTRIC CONDUCTIVITY; ELECTRON MICROSCOPES; FINITE ELEMENT METHOD; OSCILLATORS (ELECTRONIC); POISSON RATIO; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; WIRELESS TELECOMMUNICATION SYSTEMS;

LOW-PHASE-NOISE OSCILLATOR; MICROMECHANICAL RESONATOR; OSCILLATOR NOISE; PHASE NOISE;

ACOUSTIC RESONATORS;

EID: 1942424160     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2004.824840     Document Type: Letter

References (10)

1. C. T.-C. Nguyen, "Frequency-selective MEMS for miniaturized low-power communication devices," IEEE Trans. Microwave Theory Tech., vol. 47, pp. 1486-1503, Aug. 1999.
2. W. P. Robins, Phase Noise in Signal Sources (Theory and Application). London, U.K.: Peter Peregrinus Ltd., 1982.
3. T. Lee, The Design of CMOS Radio-Frequency Integrated Circuits. Cambridge, U.K.: Cambridge Univ. Press, 1998.
4. T. Mattila, J. Kiihamäki, T. Lamminmäki, O. Jaakkola, P. Rantakari, A. Oja, H. Seppä, H. Kattelus, and I. Tittonen, "12 MHz micromechanical bulk acoustic mode oscillator," Sens. Actuators A, Phys., vol. 1, no. 1, pp. 1-9, 2002.
5. S. Basrour, H. Majjad, J. R. Coudevylle, and M. de Labachelerie, "Design and test of new high Q microresonators fabricated by UV-LIGA," Proc. SPIE, vol. 4408, pp. 310-316, Apr. 25-27, 2001.
6. J. R. Clark, W.-T. Hsu, and C. T.-C. Nguyen, "High-Q VHF micromechanical contour-mode disk resonators," in Proc. IEDM, San Francisco, CA, Dec. 10-13, 2000, pp. 493-496.
7. V. Kaajakari, T. Mattila, J. Kiihamäki, H. Kattelus, A. Oja, and H. Seppä, "Nonlinearities in single-crystal silicon micromechanical resonators," in Proc. Transducers, Boston, MA, June 9-12, 2003, pp. 1574-1577.
8. T. Veijola and T. Mattila, "Modeling of nonlinear micromechanical resonators and their simulation with the harmonic-balance method," Int. J. RF Microwave Comput. Aided Eng., vol. 11, no. 5, pp. 310-321, 2001.
9. J. Nosek, "Drive level dependence of the resonant frequency in BAW quartz resonators and his modeling," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 46, pp. 823-829, Apr. 1999.
10. E. Quévy, B. Legrand, D. Collard, and L. Buchaillot, "Ultimate technology for micromachining of nanometric gap HF micromechanical resonators," in Proc. MEMS, Kyoto, Japan, Jan. 19-23, 2003, pp. 157-160.