Nonlinearities in single-crystal silicon micromechanical resonators

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 2, Issue , 2003, Pages 1574-1577

  Kaajakari, V ^a,b   Mattila, T ^a   Kiihamaki J ^a   Kattelus, H ^a   Oja, A ^a   Seppa H ^a  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

^b AALTO UNIVERSITY   (Finland)

Author keywords

Acoustic measurements; Acoustic waves; Circuit simulation; Elasticity; Micromechanical devices; Oscillators; Phase noise; Silicon; Tensile stress; Vibration measurement

Indexed keywords

ACOUSTIC NOISE; ACOUSTIC RESONATORS; ACOUSTIC WAVES; ACTUATORS; CIRCUIT SIMULATION; ELASTICITY; MICROMECHANICAL RESONATORS; MICROSYSTEMS; OSCILLATORS (ELECTRONIC); PHASE NOISE; RESONATORS; SILICON; SILICON WAFERS; SINGLE CRYSTALS; SOLID-STATE SENSORS; TENSILE STRESS; TRANSDUCERS; VIBRATION MEASUREMENT;

ACOUSTIC MEASUREMENTS; FUNDAMENTAL PERFORMANCE LIMITS; LARGE AMPLITUDE VIBRATIONS; MATERIAL NON-LINEARITY; MICROMECHANICAL DEVICE; NONLINEAR ELASTICITY; ORDERS OF MAGNITUDE; SINGLE CRYSTAL SILICON;

MONOCRYSTALLINE SILICON;

EID: 84944726705     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1217080     Document Type: Conference Paper

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