RF MEMS oscillator with integrated resistive transduction

IEEE Electron Device Letters

Volumn 27, Issue 10, 2006, Pages 805-807

  Reichenbach, R B ^a   Zalalutdinov, M ^a   Parpia, J M ^a   Craighead, H G ^a  

^a Cornell University   (United States)

Author keywords

CMOS integrated circuits; Microelectromechanical devices; Oscillators; Resistance heating; Resonators

Indexed keywords

CIRCUIT TECHNOLOGIES; ELECTRICAL DOMAINS; ELECTROMECHANICAL TRANSDUCERS; HIGH FREQUENCIES; MECHANICAL MOTIONS; MICRO MECHANICALS; OSCILLATORS; PIEZO-RESISTORS; POSITIVE FEEDBACK LOOPS; RESISTANCE HEATING; RESONANT MOTIONS; RF-MEMS; SELF-SUSTAINED OSCILLATIONS; SINGLE-CRYSTAL SILICONS;

BACTERIOPHAGES; FEEDBACK; HEATING; INTEGRATED CIRCUITS; LUMPED PARAMETER NETWORKS; MICROELECTROMECHANICAL DEVICES; MOS CAPACITORS; OPERATIONAL AMPLIFIERS; OSCILLATORS (ELECTRONIC); PIEZOELECTRIC TRANSDUCERS; RESONATORS;

CMOS INTEGRATED CIRCUITS;

EID: 64249155957     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2006.882526     Document Type: Article

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