Multifrequency pierce oscillators based on piezoelectric AlN contour-mode MEMS technology

Journal of Microelectromechanical Systems

Volumn 19, Issue 3, 2010, Pages 570-580

  Zuo, Chengjie ^a   Sinha, Nipun ^a   Van Der Spiegel, Jan ^a   Piazza, Gianluca ^a  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

Author keywords

AlN contour mode resonator; Microelectromechanical systems (MEMS); Multifrequency oscillator; Non linearity; Phase noise; Pierce oscillator; Piezoelectric resonator

Indexed keywords

ALN; CONTOUR-MODE RESONATORS; MICROELECTROMECHANICAL SYSTEMS; MULTI FREQUENCY; NON-LINEARITY; PIERCE OSCILLATOR; PIEZOELECTRIC RESONATORS;

CIRCUIT OSCILLATIONS; CRYSTAL RESONATORS; INTEGRATED CIRCUIT MANUFACTURE; LINEARIZATION; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; PHASE NOISE; PIEZOELECTRICITY; WIRELESS TELECOMMUNICATION SYSTEMS;

COMPOSITE MICROMECHANICS;

EID: 77953546722     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2010.2045879     Document Type: Article

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