Temperature compensated bulk acoustic thin film resonators

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 2000, Pages 855-858

  Lakin, K M ^a   McCarron, K T ^a   McDonald, J F ^a  

^a TFR Technologies Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM NITRIDE; ELECTRODES; PIEZOELECTRIC MATERIALS; SILICA; THIN FILMS;

SOLIDLY MOUNTED RESONATORS (SMR);

ACOUSTIC RESONATORS;

EID: 0034579262     PISSN: 10510117     EISSN: None     Source Type: Journal    
DOI: 10.1109/ULTSYM.2000.922677     Document Type: Article

References (1)