Integrated CMOS micromechanical resonator high-Q oscillator

IEEE Journal of Solid-State Circuits

Volumn 34, Issue 4, 1999, Pages 440-455

  Nguyen, Clark T C ^a   Howe, Roger T ^b  

^a UNIVERSITY OF MICHIGAN   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMPLIFIERS (ELECTRONIC); CIRCUIT OSCILLATIONS; CMOS INTEGRATED CIRCUITS; ELECTRIC POTENTIAL; ELECTRIC RESISTANCE; FABRICATION; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; RESONATORS;

MICROMECHANICAL RESONATORS; NONLINEAR OSCILLATORS;

CRYSTAL OSCILLATORS;

EID: 0033115191     PISSN: 00189200     EISSN: None     Source Type: Journal    
DOI: 10.1109/4.753677     Document Type: Article

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