The HARPSS process for fabrication of nano-precision silicon electromechanical resonators

Proceedings of the IEEE Conference on Nanotechnology

Volumn 2001-January, Issue , 2001, Pages 489-494

  No, Seong Yoel ^a   Ayazi, Farrokh ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATIC ACTUATORS; NANOLITHOGRAPHY; NANOTECHNOLOGY; RESONATORS; SILICON;

CAPACITIVE SENSING; ELECTROMECHANICAL RESONATORS; ELECTROSTATIC ACTUATION; FABRICATION PROCESS; RESONATING STRUCTURES; SILICON ELECTRODE; SILICON RESONATORS; SINGLE-CRYSTALLINE;

ELECTROMECHANICAL DEVICES;

EID: 84949214441     PISSN: 19449399     EISSN: 19449380     Source Type: Conference Proceeding    
DOI: 10.1109/NANO.2001.966471     Document Type: Conference Paper

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