Micromechanical bulk acoustic wave resonator

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 2002, Pages 945-948

  Mattila, T ^a   Oja, A ^a   Seppa H ^a   Jaakkola, O ^a   Kiihamaki J ^a   Kattelus, H ^a   Koskenvuori, M ^b   Rantakari, P ^b   Tittonen, I ^b  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

^b AALTO UNIVERSITY   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC BULK WAVE DEVICES; ACOUSTIC WAVES; ELECTRIC IMPEDANCE; QUARTZ; REACTIVE ION ETCHING; READOUT SYSTEMS; SEMICONDUCTOR DEVICES; SILICON ON INSULATOR TECHNOLOGY;

BULK ACOUSTIC MODE; MICROMECHANICAL BULK ACOUSTIC WAVE RESONATOR; MICRORESONATORS;

ACOUSTIC RESONATORS;

EID: 0036989264     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)

1. J. R. Vig and A. Ballato, "Frequency Control Devices" in Ultrasonic Instruments and Devices, (Academic Press, 1999), p. 637.
2. D. Salt, Handbook of Quartz Crystal Devices, (Van Nostrand Reinhold (UK), Wokingham, 1987).
3. C. T.-C. Nguyen, IEEE Transactions on Microwave Theory and Techniques 47, 1486 (1999).
4. D. W. Carr, S. Evoy, L. Sekaric, H. G. Craighead and J.M. Parpia, Appl. Phys. Lett. 75, 920 (1999).
5. T. Mattila, et al., Sensors and Actuators A 97-98C, 497 (2002).
6. T. Mattila et al., Sensors and Actuators A 101, 1 (2002).
7. A. N. Cleland and M. L. Roukes, J. Appl. Phys. 92, 2758 (2002).
8. J. R. Vig and Y. Kim, IEEE Trans. Ultrason. Ferroelect. Freq. Contr. 46, 1558 (1999).
9. T. Veijola and T. Mattila, RF and Microwave Computer-Aided Eng. 11, 310 (2001).
10. B. A. Auld, Acoustic Fields and Waves in Solids, vol.1, Krieger, Malabar, second ed., 1990.
11. R. Cobbold, Theory and Application of Field-Effect Transistors, (Wiley, New York, 1969).
12. W.-T. Hsu, J. R. Clark, and C. T.-C. Nguyen, Proc. IEEE MEMS Conference, Interlaken, 2001, p.349.
13. J. L. Lund et al., Proc. Solid-State Sensor, Actuator and Microsystems Workshop, Hilton Head, 2002, p. 38.
14. H.F. Tiersten, J. Acoust. Soc. Am. 59, 866 (1976).
15. K. E. Petersen, Proc. IEEE 70, 420 (1982)
16. L. V. Zhoga et al, Sov. Phys. Solid State 21, 1911 (1979).