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Volumn , Issue , 2008, Pages 135-145

Recent progress in silicon mems oscillators

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONICS APPLICATIONS; FABRICATION PROCESS; FREQUENCY REFERENCE; QUARTZ CRYSTAL OSCILLATORS; SILICON RESONATORS; TEMPERATURE STABILITY; VOLUME MANUFACTURING; WAFER-LEVEL PACKAGING TECHNOLOGY;

EID: 84861845633     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (27)

References (13)
  • 5
    • 84877812063 scopus 로고    scopus 로고
    • http://www.sitime.com
  • 9
    • 84877791609 scopus 로고    scopus 로고
    • High-Q VHF Micromechanical Contour-Mode Disk Resonators
    • 10- 13 December 2000, San Francisco, California, USA (IEEE Publication 00CH37138)
    • J. R. Clark, W.-T. Hsu, and C. T.-C. Nguyen, 2001, "High-Q VHF Micromechanical Contour-Mode Disk Resonators," in Technical Digest of the International Electronic Devices Meeting (IEDM), 10- 13 December 2000, San Francisco, California, USA (IEEE Publication 00CH37138), pp. 393-396.
    • (2001) in Technical Digest of the International Electronic Devices Meeting (IEDM) , pp. 393-396
    • Clark, J.R.1    Hsu, W.-T.2    Nguyen, C.T.-C.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.