High-Q VHF micromechanical contour-mode disk resonators

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 2000, Pages 493-496

  Clark, J R ^a   Hsu, W T ^a   Nguyen, C T C ^a  

^a University of Michigan   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; COMPOSITE MICROMECHANICS; CONTOUR MEASUREMENT; ELECTROPLATING; INTEGRATED CIRCUITS; MICROMACHINING; NATURAL FREQUENCIES; POLYSILICON; Q FACTOR MEASUREMENT; TRANSCEIVERS;

VIBRATING DISK RESONATORS;

RESONATORS;

EID: 0034454242     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)