Multi-frequency pierce oscillators based on piezoelectric AlN contour-mode MEMS resonators

2008 IEEE International Frequency Control Symposium, FCS

Volumn , Issue , 2008, Pages 402-407

  Zuo, Chengjie ^a   Sinha, Nipun ^a   Van Der Spiegel, Jan ^a   Piazza, Gianluca ^a  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

Author keywords

AlN contour mode resonator; MicroElectroMechanical Systems (MEMS); Multi frequency oscillator; Pierce oscillator; Piezoelectric resonator

Indexed keywords

CIRCUIT OSCILLATIONS; COMPOSITE MICROMECHANICS; ELECTROMECHANICAL DEVICES; INTEGRATED CIRCUIT MANUFACTURE; INTEGRATED CIRCUITS; MEMS; MICROELECTROMECHANICAL DEVICES; PHASE NOISE; PIEZOELECTRICITY; RESONATORS;

ALN CONTOUR-MODE RESONATOR; MICROELECTROMECHANICAL SYSTEMS (MEMS); MULTI-FREQUENCY OSCILLATOR; PIERCE OSCILLATOR; PIEZOELECTRIC RESONATOR;

OSCILLATORS (ELECTRONIC);

EID: 55649115308     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/FREQ.2008.4623028     Document Type: Conference Paper

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