Combined capacitive and piezoelectric transduction for high performance silicon microresonators

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2011, Pages 169-172

  Samarao, A K ^a   Ayazi, F ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AIR-GAPS; ALN; C-AXIS ORIENTATIONS; FEED THROUGH; HIGH ASPECT RATIO; MICRO RESONATORS; MICROMECHANICAL RESONATOR; PROCESS TECHNOLOGIES; QUALITY FACTORS; SILICON MICRORESONATORS; SINGLE CRYSTAL SILICON; SPURIOUS MODES; TOP SURFACE;

ALUMINUM; ALUMINUM NITRIDE; ASPECT RATIO; BANDPASS FILTERS; MECHANICAL ENGINEERING; MECHANICS; MEMS; NITRIDES; PIEZOELECTRICITY; POLYSILICON; REACTIVE ION ETCHING; RESONATORS;

BACTERIOPHAGES;

EID: 79953774172     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2011.5734388     Document Type: Conference Paper

References (10)

1. F. Ayazi, "MEMS for Integrated Timing and Spectral Processing," Invited Paper, Proc. IEEE Custom Integrated Circuits Conference (CICC), pp. 65-72, 2009.
2. S. Pourkamali, G. K. Ho and F. Ayazi, "Low-impedance VHF and UHF capacitive SiBARs - Part 1: concept and fabrication & Part II: measurement and characterization," IEEE Transaction on Electron Devices, vol.54, no.8, pp. 2017-2030, 2007.
3. R. Abdolvand, H. M. Lavasani and F. Ayazi, "Thin-Film Piezoelectric-on-Silicon Resonators for High-Frequency Reference Oscillator Applications," IEEE Trans. on Ultrasonics, Ferroelectrics and Frequency Control, vol. 55, no. 12, pp. 2596 - 2606, 2008.
4. A. K. Samarao and F. Ayazi, "Quality Factor Sensitivity to Crystallographic Misalignments in Silicon Micromechanical Resonators," Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head 2010), pp. 479-482, 2010.
5. W. Pan and F. Ayazi, "Thin-Film Piezoelectric-on-Substrate Resonators with Q Enhancement and TCF Reduction," Proc. IEEE Micro Electro Mechanical Systems, pp. 104-107, 2010.
6. B. Razavi, "Cognitive Radio Design Challenges and Techniques," IEEE Journal of Solid-State Circuits, vol. 45, pp. 1542-1553, 2010.
7. A. K. Samarao and F. Ayazi, "Self-Polarized Capacitive Silicon Micromechanical Resonators via Charge Trapping," to be presented at the IEEE International Electron Devices Meeting (IEDM), 2010.
8. W.-T. Hsu, et al., "Stiffness-Compensated Temperature-Insensitive Micromechanical Resonators," Proc. IEEE Micro Electro Mechanical Systems (MEMS), pp. 731-734, 2002. (Pubitemid 34216374)
9. A. K. Samarao, G. Casinovi and F. Ayazi, "Passive TCF Compensation in High Q Silicon Micromechanical Resonators," Proc. IEEE Micro Electro Mechanical Systems (MEMS), pp. 116-119, 2010.
10. A. K. Samarao and F. Ayazi, "Intrinsic Temperature Compensation of Highly Resistive High-Q Silicon Microresonaotors via Charge Carrier Depletion," Proc. IEEE Intl. Freq. Ctrl. Sym. (IFCS), pp. 334-339, 2010.