Electrostatic transducers for micromechanical resonators: Free space and solid dielectric

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 53, Issue 12, 2006, Pages 2484-2489

  Kaajakari, Ville ^a,b   Alastalo, Ari T ^b   Mattila, Tomi ^a,b  

^a IEEE   (Finland)

^b VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

BEAM RESONATORS; ELECTROSTATIC TRANSDUCERS; INTERNAL TRANSDUCERS;

ELECTROSTATIC DEVICES; PERMITTIVITY; TRANSDUCERS;

RESONATORS;

ACOUSTICS; COMPUTER AIDED DESIGN; COMPUTER SIMULATION; ELECTRICITY; ELECTRONICS; EQUIPMENT; EQUIPMENT DESIGN; EVALUATION; IMPEDANCE; INSTRUMENTATION; LETTER; MECHANICS; THEORETICAL MODEL; TRANSDUCER;

ACOUSTICS; COMPUTER SIMULATION; COMPUTER-AIDED DESIGN; ELECTRIC IMPEDANCE; ELECTROSTATICS; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; MECHANICS; MINIATURIZATION; MODELS, THEORETICAL; TRANSDUCERS;

EID: 33846209511     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2006.197     Document Type: Article

References (12)

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