Noise in microelectromechanical system resonators

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 46, Issue 6, 1999, Pages 1558-1565

  Vig, John R ^a   Kim, Yoonkee ^a  

^a US Army Communications and Electronics Command   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BROWNIAN MOVEMENT; DEGASSING; ELECTRIC FILTERS; HEATING; PHONONS; PHOTONS; RESONATORS; SPURIOUS SIGNAL NOISE; THERMAL EFFECTS; VIBRATIONS (MECHANICAL);

NANOELECTROMECHANICAL SYSTEMS (NEMS);

MICROELECTROMECHANICAL DEVICES;

EID: 0033352716     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/58.808881     Document Type: Article

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