Stability of wafer level vacuum encapsulated single-crystal silicon resonators

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 1, Issue , 2005, Pages 916-919

  Kaajakari, Ville ^a   Kiihamäki, Jyrki ^a   Oja, Aarne ^a   Seppä, Heikki ^a   Pietikäinen, Sami ^b   Kokkala, Ville ^b   Kuisma, Heikki ^b  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

^b VTI Technologies Oy   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

BULK ACOUSTIC WAVE (BAW) RESONATORS; DEEP REACTIVE ION ETCHING (DRIE); SINGLE-CRYSTAL SILICON; WAFER LEVEL VACUUM ENCAPSULATION;

ENCAPSULATION; MICROELECTROMECHANICAL DEVICES; REACTIVE ION ETCHING; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; SINGLE CRYSTALS; STRESSES;

CRYSTAL RESONATORS;

EID: 27544480377     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2005.1496567     Document Type: Conference Paper

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