Temperature and pressure dependence of resonance in multi-layer microcantilevers

Journal of Micromechanics and Microengineering

Volumn 15, Issue 8, 2005, Pages 1454-1458

  Sandberg, R ^a   Svendsen, W ^a   Molhave K ^a   Boisen, A ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

COATINGS; DEPOSITION; FINITE ELEMENT METHOD; FREQUENCIES; GOLD; RESONANCE; SILICA;

EIGENMODES; GOLD COATINGS; MASS DETECTORS; MICROCANTILEVERS;

CANTILEVER BEAMS;

EID: 22544465608     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/8/011     Document Type: Article

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