Energy loss in MEMS resonators and the impact on inertial and RF devices

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 688-695

  Weinberg, Marc ^a   Candler, Rob ^c   Chandorkar, Saurabh ^b   Varsanik, Jonathan ^d   Kenny, Thomas ^b   Duwel, Amy ^a  

^a CHARLES STARK DRAPER LABORATORY   (United States)

^b STANFORD UNIVERSITY   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

^d USA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ENERGY DISSIPATION; MICROELECTROMECHANICAL DEVICES; MICROSYSTEMS; RESONATORS;

ENERGY LOSS MECHANISMS; HIGH QUALITY FACTORS; MEMS GYRO; MEMS RESONATORS; MICRO-MACHINED; RADIO FREQUENCY APPLICATIONS; RF DEVICES;

SOLID-STATE SENSORS;

EID: 71449107010     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285418     Document Type: Conference Paper

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