Non-linearity cancellation in MEMS resonators for improved power-handling

Technical Digest - International Electron Devices Meeting, IEDM

Volumn 2005, Issue , 2005, Pages 286-289

  Agarwal, M ^a   Park, K ^a   Candler, R ^a   Hopcroft, M ^a   Jha, C ^a   Melamud, R ^a   Kim, B ^a   Murmann, B ^a   Kenny, T W ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC POWER UTILIZATION; ELECTRODES; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES;

MECHANICAL NON-LINEARITIES; RESONATOR GAPS;

RESONATORS;

EID: 33847700487     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. S. Lee and C. T.-C. Nguyen, "Influence of automatic level control on micromechanical resonator oscillator phase noise," presented at Frequency Control Sympposium and PDA Exhibition Jointly with the 17th European Frequency and Time Forum, 2003. Proceedings of the 2003 IEEE International, 2003.
2. V. Kaajakari, T. Mattila, A. Oja, and H. Seppa, "Nonlinear limits for single-crystal silicon microresonators," Microelectromechanical Systems, Journal of, vol. 13, pp. 715-724, 2004.
3. P. Rantakari, V. Kaajakari, T. Mattila, J. Kiihamaki, A. Oja, I. Tittonen, and H. Seppa, "Low noise, low power micromechanical oscillator.," presented at 13th International Conference on Solid-State Sensors, Actuators and Microsystems, Seoul, Korea, 2005.
4. S. Lee, M. U. Demirci, and C. T.-C. Nguyen, "A 10-MHz Micromechanical Resonator Pierce Reference Oscillator for Communications," presented at Solid-State Sensors and Actuators, Munich, Germany, 2001.
5. S. Lee and C. T.-C. Nguyen, "Phase noise amplitude dependence in self limiting wine-glass disk oscillators.," presented at Solid State Sensor, Actuator, and Microsystems Workshop, Hilton Head, SC, 2004.
6. L. D. Landau and E. M. Lifshitz, "Resonance in non-linear oscillations," in Mechanics, vol. 1, Course of Theoretical Physics, 1 ed. Reading, MA USA: Addison-Wesley Publishing Company, 1960, pp. 87-92.
7. R. N. Candler, W.-T. Park, M. Hopcroft, B. Kim, and T. W. Kenny, "Hydrogen diffusion and pressure control of encapsulated MEMS resonator.," presented at 13th International conference on Solid-Sensors, Actuators and Microsystems, Seoul, South Korea, 2005.