Low-impedance VHF and UHF capacitive silicon bulk acoustic-wave resonators - Part II: Measurement and characterization

IEEE Transactions on Electron Devices

Volumn 54, Issue 8, 2007, Pages 2024-2030

  Pourkamali, Siavash ^a   Ho, Gavin K ^b   Ayazi, Farrokh ^b  

^a University of Denver   (United States)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Bulk acoustic wave resonators; High aspect ratio polysilicon and single crystal silicon (HARPSS); MEMS; Micromachining; Micromechanical resonators; Silicon resonators

Indexed keywords

MEMS; MICROMACHINING; POLYSILICON; SINGLE CRYSTALS; TUNING;

BULK ACOUSTIC WAVE RESONATORS; FREQUENCY TUNING; MICROMECHANICAL RESONATORS;

RESONATORS;

EID: 34547889037     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2007.901405     Document Type: Article

References (10)

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