MEMS technology for timing and frequency control

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 54, Issue 2, 2007, Pages 251-270

  Nguyen, Clark T C ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC PHYSICS; ELECTROMECHANICAL DEVICES; MEMS; MICROMECHANICAL RESONATORS;

ATTRACTIVE SOLUTIONS; INTEGRATED TRANSISTORS; MICROELECTROMECHANICAL-SYSTEMS TECHNOLOGIES; MICROMECHANICAL CIRCUIT; MICROMECHANICAL RF FILTERS; PROCESSING CIRCUITS; REFERENCE OSCILLATORS; STAND-ALONE DEVICES;

CHIP SCALE PACKAGES;

ACOUSTICS; ELECTROMAGNETIC FIELD; ELECTRONICS; EQUIPMENT DESIGN; INSTRUMENTATION; MECHANICS; METHODOLOGY; RADIOFREQUENCY RADIATION; REVIEW; TECHNOLOGY; TRANSDUCER;

ACOUSTICS; ELECTROMAGNETICS; EQUIPMENT DESIGN; MECHANICS; MINIATURIZATION; RADIO WAVES; TECHNOLOGY; TRANSDUCERS;

EID: 33947605764     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2007.240     Document Type: Review

References (62)

1. A. A. Abidi, "Direct-conversion radio transceivers for digital comms," IEEE J. Solid-State Circ., vol. 30, no. 12, pp. 1399-1410, Dec. 1995.
2. J. Crols and M. S. J. Steyaert, "A single-chip 900 MHz CMOS receiver front-end with a high performance low-IF topology," IEEE J. Solid-State Circ., vol. 30, no. 12, pp. 1483-1492, Dec. 1995.
3. C. P. Yue and S. S. Wong, "On-chip spiral inductors with patterned ground shields for Si-based RF IC's," IEEE J. Solid-State Circ., vol. 33, no. 5, pp. 743-752, May 1998.
4. C. T.-C. Nguyen, "Transceiver front-end architectures using vibrating micromechanical signal processors," in RF Technologies for Low Power Wireless Communications. G. I. Haddad, T. Itoh, and J. Harvey, Eds. New York: Wiley IEEE-Press, 2001, pp. 411-461.
5. C. T.-C. Nguyen, "Vibrating RF MEMS overview: applications to wireless communications (invited)," in Proc. SPIE: Micromachin. Microfabric. Process Technol., San Jose, CA, vol. 5715, Jan. 22-27, 2005, pp. 11-25.
6. J. Wang, J. E. Butler, T. Feygelson, and C. T.-C. Nguyen, "1.51-GHz polydiamond micromechanical disk resonator with impedance-mismatched isolating support," in Proc. IEEE Int. MEMS Conf., Maastricht, The Netherlands, Jan. 25-29, 2004, pp. 641-644.
7. S.-S. Li, Y.-W. Lin, Y. Xie, Z. Ren, and C. T.-C. Nguyen, "Micromechanical hollow-disk ring resonators," in Proc. 17th IEEE Int. MEMS Conf., Maastricht, The Netherlands, Jan. 25-29, 2004, pp. 821-824.
8. W.-T. Hsu and C. T.-C. Nguyen, "Stiffness-compensated temperature-insensitive micromechanical resonators," in Tech. Dig., IEEE Int. MEMS Conf., Las Vegas, NV, Jan. 20-24, 2002, pp. 731-734.
9. V. Kaajakari, J. Kiihamäki, A. Oja, H. Seppä, S. Pietikäinen, V. Kokkala, and H. Kuisma, "Stability of wafer level vacuum encapsulated single-crystal silicon resonators," in Tech. Dig., Int. Conf. Solid-State Sensors, Actuators, Microsyst. (Transducers' 05), Seoul, Korea, Jun. 2005, pp. 916-919.
10. B. Kim, R. N. Candler, M. Hopcroft, M. Agarwal, W.-T. Park, and T. W. Kenny, "Frequency stability of wafer-scale encapsulated MEMS resonators," in Tech. Dig., Int. Conf. Solid-State Sensors, Actuators, Microsyst. (Transducers'05), Seoul, Korea, Jun. 2005, pp. 1965-1968.
11. Y.-W. Lin, S.-S. Li, Z. Ren, and C. T.-C. Nguyen, "Low phase noise array-composite micromechanical wine-glass disk oscillator," in Tech. Dig., IEEE Int. Electron Devices Mtg., Washington, DC, Dec. 5-7, 2005, pp. 287-290.
12. Y.-W. Lin, S. Lee, S.-S. Li, Y. Xie, Z. Ren, and C. T.-C. Nguyen, "Series-resonant VHF micromechanical resonator reference oscillators," IEEE J. Solid-State Circ., vol. 39, no. 12, pp. 2477-2491, Dec. 2004.
13. V. Kaajakari, T. Mattila, A. Oja, J. Kiihamäki, and H. Seppä, "Square-extensional mode single-crystal silicon micromechanical resonator for low-phase-noise oscillator applications," IEEE Electron Device Lett., vol. 25, no. 4, pp. 173-175, Apr. 2004.
14. C. T.-C. Nguyen and R. T. Howe, "An integrated CMOS micromechanical resonator high-Q oscillator," IEEE J. Solid-State Circ., vol. 34, no. 4, pp. 440-455, Apr. 1999.
15. A. E. Franke, J. M. Heck, T.-J. King, and R. T. Howe, "Polycrystalline silicon-germanium films for integrated microsystems," IEEE/ASME J. Microelectromech. Syst., vol. 12, no. 2, pp. 160-171, Apr. 2003.
16. T. A. Core, W. K. Tsang, and S. J. Sherman, "Fabrication technology for an integrated surface-micromachined sensor," Solid State Technol., pp. 39-47, Oct. 1993.
17. R. C. Ruby, P. Bradley, Y. Oshmyansky, A. Chien, and J. D. Larson, III, "Thin film bulk wave acoustic resonators (FBAR) for wireless applications," in Proc. IEEE Ultrason. Symp., Atlanta, GA, 2001, pp. 813-821.
18. H. Yu, W. Pang, H. Zhang, and E. S. Kim, "Film bulk acoustic resonator at 4.4 GHz with ultra low temperature coefficient of resonant frequency," in Tech. Dig., 18th IEEE Int. MEMS Conf., Miami Beach, FL, Jan. 30-Feb. 3, 2005, pp. 28-31.
19. F. D. Bannon, III, J. R. Clark, and C. T.-C. Nguyen, "High frequency micromechanical filters," IEEE J. Solid-State Circ., vol. 35, no. 4, pp. 512-526, Apr. 2000.
20. K. Wang, A.-C. Wong, and C. T.-C. Nguyen, "VHF free-free beam high-Q micromechanical resonators," IEEE/ASME J. Microelectromech. Syst., vol. 9, no. 3, pp. 347-360, Sep. 2000.
21. M. A. Abdelmoneum, M. U. Demirci, and C. T.-C. Nguyen, "Stemless wine-glass-mode disk micromechanical resonators," in Proc. 16th IEEE Int. MEMS Conf., Kyoto, Japan, Jan. 19-23, 2003, pp. 698-701.
22. J. Wang, Z. Ren, and C. T.-C. Nguyen, "1.156-GHz self-aligned vibrating micromechanical disk resonator," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 51, no. 12, pp. 1607-1628, Dec. 2004.
23. M. U. Demirci and C. T.-C. Nguyen, "Higher-mode free-free beam micromechanical resonators," in Proc. IEEE Int. Freq. Contr. Symp., Tampa, FL, May 5-8, 2003, pp. 810-818.
24. X. M. H. Huang, C. A. Zorman, M. Mehregany, and M. L. Roukes, "Nanodevice motion at microwave frequencies," Nature, vol. 421, p. 496, Jan. 30, 2003.
25. J. R. Vig and Y. Kim, "Noise in microelectromechanical system resonators," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 46, no. 6, pp. 1558-1565, Nov. 1999.
26. B. Bircumshaw, G. Lui, H. Takeuchi, T.-J. King, R. T. Howe, O. O'Reilly, and A. P. Pisano, "The radial bulk annular resonator: Towards a 50Ù MEMS filter," in Tech. Dig., Transducers'03, Boston, MA, Jun. 8-12, 2003, pp. 875-878.
27. Y. Xie, S.-S. Li, Y.-W. Lin, Z. Ren, and C. T.-C. Nguyen, "UHF micromechanical extensional wine-glass mode ring resonators," in Tech. Dig., IEEE Int. Electron Devices Mtg., Washington, DC, Dec. 8-10, 2003, pp. 953-956.
28. A.-C. Wong and C. T.-C. Nguyen, "Micromechanical mixerfilters ("mixlers")," IEEE/ASME J. Microelectromech. Syst., vol. 13, no. 1, pp. 100-112, Feb. 2004.
29. S.-S. Li, Y.-W. Lin, Z. Ren, and C. T.-C. Nguyen, "Self-switching vibrating micromechanical filter bank," in Proc. IEEE Joint Int. Freq. Contr./Precision Time & Time Interval Symp., Vancouver, Canada, Aug. 29-31, 2005, pp. 135-141.
30. H. Nathanson, W. E. Newell, R. A. Wickstrom, and J. R. Davis, Jr., "The resonant gate transistor," IEEE Trans. Electron Devices, vol. ED-14, no. 3, pp. 117-133, Mar. 1967.
31. S. Pourkamali, Z. Hao, and F. Ayazi, "VHF single crystal silicon capacitive elliptic bulk-mode disk resonators-Part II: Implementation and characterization," IEEE/ASME J. Microelectromech. Syst., vol. 13, no. 6, pp. 1054-1062, Dec. 2004.
32. S. Pourkamali, G. K. Ho, and F. Ayazi, "Vertical capacitive SiBARs," in Tech. Dig., 18th IEEE Int. MEMS Conf., Miami Beach, FL, Jan. 30-Feb. 3, 2005, pp. 211-214.
33. G. Piazza, P. J. Stephanou, J. M. Porter, M. B. J. Wijesundara, and A. P. Pisano, "Low motional resistance ring-shaped contour-mode aluminum nitride piezoelectric micromechanical resonators for UHF applications," in Tech. Dig., 18th IEEE Int. MEMS Conf., Miami Beach, FL, Jan. 30-Feb. 3, 2005, pp. 20-23.
34. F. P. Stratton, D. T. Chang, D. J. Kirby, R. J. Joyce, T.-Y. Hsu, R. L. Kubena, and Y.-K. Yong, "A MEMS-based quartz resonator technology for GHz applications," in Proc. IEEE Int. Ultrason., Ferroelect., Freq. Contr. Conf., Montreal, Canada, Aug. 24-27, 2004, pp. 27-34.
35. Y.-W. Lin, S.-S. Li, Z. Ren, and C. T.-C. Nguyen, "Vibrating micromechanical resonators with solid dielectric capacitive-transducer 'gaps'," in Proc. Joint IEEE Int. Freq. Contr./Precision Time & Time Interval Symp., Vancouver, Canada, Aug. 29-31, 2005, pp. 128-134.
36. D. Weinstein, H. Chandrahalim, L. F. Cheow, and S. A. Bhave, "Dielectrically transduced single-ended to differential MEMS filter," in Tech. Dig., IEEE Int. Solid-State Circuits Conf., San Francisco, CA, Feb. 5-9, 2006, pp. 318-319.
37. K. Wang and C. T.-C. Nguyen, "High-order medium frequency micromechanical electronic filters," IEEE/ASME J. Microelectromech. Syst., vol. 8, no. 4, pp. 534-557, Dec. 1999.
38. S.-S. Li, M. U. Demirci, Y.-W. Lin, Z. Ren, and C.T.-C. Nguyen, "Bridged micromechanical filters," in Proc. IEEE Int. Ultrason., Ferroelect., Freq. Contr. Conf., Montreal, Canada, Aug. 24-27, 2004, pp. 144-150.
39. M. Demirci and C. T.-C. Nguyen, "Mechanically corner-coupled square microresonator array for reduced series motional resistance," IEEE/ASME J. Microelectromech. Syst., vol. 15, no. 6, pp. 1419-1436, Dec. 2006.
40. M. U. Demirci and C. T.-C. Nguyen, "A low impedance VHF micromechanical filter using coupled-array composite resonators," in Tech. Dig., 13th Int. Conf. Solid-State Sensors & Actuators (Transducers'05), Seoul, Korea, Jun. 5-9, 2005, pp. 2131-2134.
41. S.-S. Li, Y.-W. Lin, Z. Ren, and C. T.-C. Nguyen, "Disk-array design for suppression of unwanted modes in micromechanical composite-array filters," in Tech. Dig., 19th IEEE Int. MEMS Conf., Istanbul, Turkey, Jan. 22-26, 2006, pp. 866-869.
42. R. Navid, J. R. Clark, M. Demirci, and C. T.-C. Nguyen, "Third-order intermodulation distortion in capacitively-driven CC-beam micromechanical resonators," in Tech. Dig., 14th IEEE Int. MEMS Conf., Interlaken, Switzerland, Jan. 21-25, 2001, pp. 228-231.
43. A. T. Alastalo and V. Kaajakari, "Intermodulation in capacitively coupled microelectromechanical filters," IEEE Electron Device Lett., vol. 26, no. 5, pp. 289-291, May 2005.
44. Y.-W. Lin, S.-S. Li, Z. Ren, and C. T.-C. Nguyen, "Third-order intermodulation distortion in capacitively-driven VHF micromechanical resonators," in Proc. IEEE Ultrason. Symp., Sep. 18-21, 2005, pp. 1592-1595.
45. D. B. Leeson, "A simple model of feedback oscillator noise spectrum," Proc. IEEE, vol. 54, pp. 329-330, Feb. 1966.
46. M. Tiebout, "Low-power low-phase-noise differentially tuned quadrature VCO design in standard CMOS," IEEE J. Solid-State Circ., vol. 36, no. 7, pp. 1018-1024, Jul. 2001.
47. Data sheet, Model CVHD-950, ultra-low phase noise voltage controlled crystal oscillator, Ft. Myers, FL: Crystek Crystals Corp..
48. S. Lee and C. T.-C. Nguyen, "Mechanically-coupled micromechanical arrays for improved phase noise," in Proc. IEEE Int. Ultrason., Ferroelect., Freq. Contr. Conf., Montreal, Canada, Aug. 24-27, 2004, pp. 280-286.
49. S. Lee and C. T.-C. Nguyen, "Influence of automatic level control on micromechanical resonator oscillator phase noise," in Proc. IEEE Int. Freq. Contr. Symp., Tampa, FL, May 5-8, 2003, pp. 341-349.
50. V. Kaajakari, J. K. Koskinen, and T. Mattila, "Phase noise in capacitively coupled micromechanical oscillators," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 52, no. 12, pp. 2322- 2331, Dec. 2005.
51. C. T.-C. Nguyen and R. T. Howe, "Microresonator frequency control and stabilization using an integrated micro oven," in Tech. Dig., 7th Int. Conf. Solid-State Sensors Actuators (Transducers' 93), Yokohama, Japan, Jun. 7-10, 1993, pp. 1040-1043.
52. R. Lutwak, J. Deng, W. Riley, M. Varghese, J. Leblanc, G. Tepolt, M. Mescher, K. K. Serkland, K. M. Geib, and G. M. Peake, "The chip-scale atomic clock-low-power physics package," in Proc. Precision Time and Time Interval (PTTI) Syst. Applic. Mtg., Washington, DC, Dec. 7-9, 2004.
53. L. Liew, S. Knappe, J. Moreland, H. G. Robinson, L. Hollberg, and J. Kitching, "Microfabricated alkali atom vapor cells," Appl. Phys. Lett., vol. 84, pp. 2694-2696, Apr. 2004.
54. Recommended Minimum Performance Standards for Dualmode Wideband Spread Spectrum Cellular Mobile Stations, TIA/EIA/IS-98-A Interim Standard, Jul. 1996.
55. W. Y. Ali-Ahmad, "RF system issues related to CDMA receiver specifications," RF Design, pp. 22-32, Sep. 1999.
56. D. K. Shaeffer and T. H. Lee, "A 1.5-V, 1.5-GHz CMOS low noise amplifier," IEEE J. Solid-State Circ., vol. 32, no. 5, pp. 745-759, May 1997.
57. B. G. Goldberg, "The evolution and maturity of fractional-N PLL synthesizers," Microwave J., pp. 124-134, Sep. 1996.
58. J. Wang, Y. Xie, and C. T.-C. Nguyen, "Frequency tolerance of RF micromechanical disk resonators in nanocrystalline diamond and polysilicon structural materials," in Tech. Dig., IEEE Int. Electron Devices Mtg., Washington, DC, Dec. 5-7, 2005, pp. 291-294.
59. M. A. Abdelmoneum, M. U. Demirci, Y.-W. Lin, and C. T.-C. Nguyen, "Location-dependent tuning of vibrating micromechanical resonators via laser trimming," in Proc. IEEE Int. Ultrason., Ferroelect., Freq. Contr. Conf., Montreal, Canada, Aug. 24-27, 2004, pp. 272-279.
60. D. Sparks, S. Massoud-Ansari, and N. Najafi, "Long-term evaluation of hermetically glass frit sealed silicon to Pyrex wafers with feedthroughs," J. Micromech. Microeng., vol. 15, pp. 1560-1564, 2005.
61. K. S. Lebouitz, A. Mazaheri, R. T. Howe, and A. P. Pisano, "Vacuum encapsulation of resonant devices using permeable polysilicon," in Tech. Dig., 12th IEEE Int. MEMS Conf., Orlando, FL, Jan. 17-21, 1999, pp. 470-475.
62. W.-L. Huang, Z. Ren, and C. T.-C. Nguyen, "Nickel vibrating micromechanical disk resonator with solid dielectric capacitive-transducer gap," in Proc. IEEE Int. Freq. Contr. Symp., Miami, FL, Jun. 5-7, 2006, pp. 839-847.