PN-diode transduced 3.7-GHZ silicon resonator

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2010, Pages 208-211

  Hwang, Eugene ^a   Bhave, Sunil A ^a  

^a Department of Obstetrics Gynecology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AIR-GAPS; DEPLETION REGION; FREQUENCY-SCALING; HIGH QUALITY FACTORS; IMMOBILE CHARGES; LONGITUDINAL MODES; MICROMECHANICAL RESONATOR; PN-DIODE; RESONANT FREQUENCIES; SILICON RESONATORS; TRANSDUCTION METHOD;

MECHANICAL ENGINEERING; MECHANICS; NATURAL FREQUENCIES; REACTIVE ION ETCHING; SEMICONDUCTING SILICON COMPOUNDS;

RESONATORS;

EID: 77952776932     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2010.5442528     Document Type: Conference Paper

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