1.05-GHz CMOS oscillator based on lateral- field-excited piezoelectric AlN contour- mode MEMS resonators

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 57, Issue 1, 2010, Pages 82-87

  Zuo, Chengjie ^a   Van Der Spiegel, Jan ^a   Piazza, Gianluca ^a  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALN; ALN RESONATORS; AMI SEMICONDUCTORS; CMOS OSCILLATORS; COMPLEMENTARY METAL OXIDE SEMICONDUCTORS; CONTOUR-MODE RESONATORS; DC POWER; FIGURE OF MERIT; FILM BULK ACOUSTIC RESONATORS; GIGAHERTZ FREQUENCIES; GIGAHERTZ OSCILLATORS; LOCAL OSCILLATORS; MANUFACTURING TOLERANCES; MASK PROCESS; MEMS RESONATORS; MICRO-ELECTRO-MECHANICAL; MULTIBAND; OFFSET FREQUENCIES; ON CHIPS; ONCHIP INDUCTORS; PHASE-NOISE LEVELS; POST-CMOS; RE-CONFIGURABLE; SURFACE ACOUSTIC WAVES; ULTRA-HIGH FREQUENCY; WIRELESS COMMUNICATIONS;

ACOUSTIC RESONATORS; ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ACOUSTICS; CELLULAR TELEPHONE SYSTEMS; GLOBAL SYSTEM FOR MOBILE COMMUNICATIONS; MEMS; MICROELECTROMECHANICAL DEVICES; PHASE NOISE; PIEZOELECTRICITY; RESONATORS; WIRELESS TELECOMMUNICATION SYSTEMS;

OSCILLATORS (ELECTRONIC);

ALUMINUM DERIVATIVE; ALUMINUM NITRIDE;

ACOUSTICS; ARTICLE; CHEMISTRY; COMPUTER AIDED DESIGN; EQUIPMENT; EQUIPMENT DESIGN; INSTRUMENTATION; MICROELECTROMECHANICAL SYSTEM; MICROWAVE RADIATION; OSCILLOMETRY; REPRODUCIBILITY; SEMICONDUCTOR; SENSITIVITY AND SPECIFICITY; TRANSDUCER; VIBRATION;

ACOUSTICS; ALUMINUM COMPOUNDS; COMPUTER-AIDED DESIGN; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; MICRO-ELECTRICAL-MECHANICAL SYSTEMS; MICROWAVES; OSCILLOMETRY; REPRODUCIBILITY OF RESULTS; SEMICONDUCTORS; SENSITIVITY AND SPECIFICITY; TRANSDUCERS; VIBRATION;

EID: 73649098497     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.1382     Document Type: Conference Paper

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