Silicon carbide lateral overtone bulk acoustic resonator with ultrahigh quality factor

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2011, Pages 788-792

  Ziaei Moayyed, M ^a   Habermehl, S D ^a   Branch, D W ^a   Clews, P J ^a   Olsson III, R H ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALN; QUALITY FACTORS; SILICON CARBIDE FILMS; STANDARD CMOS; STORAGE SCHEMES; TRANSDUCTION EFFICIENCY;

ALUMINUM NITRIDE; BACTERIOPHAGES; MECHANICAL ENGINEERING; MECHANICS; MEMS; NITRIDES; REACTIVE ION ETCHING; SILICON CARBIDE;

RESONATORS;

EID: 79953777839     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2011.5734543     Document Type: Conference Paper

References (17)

1. C. T.-C. Nguyen, "MEMS technology for timing and frequency control," IEEE Trans. Ultrasonic., Frequencies, Freq. Control 2007, 54, 251-270.
2. G. Piazza, P. J. Stephanou, and A. P. Pisano, "Piezoelectric aluminum nitride vibrating contour-mode MEMS resonators," J. Microelectromech. Syst., vol.15, no.6, pp.1406-1418, Dec.2006. (Pubitemid 44921759)
3. S. A. Bhave, D. Gao, R. Maboudian, and R. T. Howe, "Fully- differential poly-SiC lame mode resonator and checkerboard filter," IEEE Int. Conf. on Micro Electro Mechanical Systems 2005, 223-226. (Pubitemid 41462337)
4. C. Roper, R. Carraro, R. T. Howe, R. Maboudian, "Silicon Carbide Thin Films using 1,3-Disilabutane Single Precursor for MEMS Applications- A Review," ECS Trans. 2006, 3(10), 267-280.
5. X. M. Huang, M. K. Prakash, C. A. Zorman, M. Mehregany, and M. L. Roukes, "Free-free beam silicon carbide nanomechan ical resonators," Int. Conf. on Solid-State Sensors, Actuators and Microsystems 2003, 342-343.
6. Y. T. Yang, K. L. Ekinci, M. H. Huang, L. M. Schiavone, M. L. Roukes, C. A. Zorman, and M. Mehregany, "SiC nanoelectromechanical systems," Applied Physics Letters 2001, 78(2), 162-164.
7. D. Y. Young, I. E. Pehlivanoglu, C. A. Zorman, "Silicon Carbide MEMS-resonator-based oscillator," J. Micromechanics and Microengineering 2009, 19, 115027.
8. G. K. Ho, R. Abdolvand, and F. Ayazi, "High order composite bulk acoustic resonators," IEEE International Conference on Micro Electro Mechanical Systems 2007, 791-794.
9. H. Chandrahalim, S. A. Bhave, R. G. Polcawich, and J. S. Pulskamp, "PZT transduced high-overtone width extensional resonators above 1GHz," IEEE Ultrasonics Symposium 2009, 2145-2148.
10. G. R. Kline, L. M. Lakin, and K. T. McCarron, "Overmoded high Q resonators for microwave oscillators," IEEE Frequency Control Symp. 1993, 718-721.
11. H. Yu, C. Y. Lee, W. Pang, H. Zhang, A. Brannon, J. Kitching, and E. S. Kim, "HBAR-based 3.6GHz oscillator with low power consumption and low phase noise," IEEE transactions on Ultrasonics, Ferroelectrics, and Frequency Control 2009, 56 (2), pp.400-403.
12. R. Tabrizian, M. Rais-Zadeh, and F. Ayazi, "Effect of phonon interactions on limiting the f.Q of micromechanical resonators," Int. Conf. on Solid-State Sensors, Actuator, Microsystems 2009, 2131-2134.
13. S. A. Chandorkar, M. Agrawal, R. Melamud, R. N. Candler, K. E. Goodson, T. W. Kenny, "Limits of quality factor in bulk-mode micromechanical resonators," IEEE International Conf. on Micro Electro Mechanical Systems 2005, 74-77.
14. W.-C. Li, Y. Lin, B. Kim, Z. Ren, C. T.-C. Nguyen, "Quality factor enhancement in micromechanical resonators at cryogenic temperatures," Int. Conf. on Solid-State Sensors, Actuators and Microsystems 2009, 1445-1448.
15. E. Hwang and S. A. Bhave Solid-State Sensors, "Low temperature quality factor Scaling of GHz frequency silicon resonators, "Actuators, and Microsystems Workshop 2010, 388-389.
16. J. Salvia, M. Messana, M. Ohline, M. A. Hopcroft, R. Melamud, S. Chandorkar, H.-K. Lee, G. Bahl, B. Murmann, T. W. Kenny, "Exploring the limits and practicality of Q-based temperature compensation for silicon resonators," IEEE Int. Electronic Devices Meeting 2008, 671-674.
17. R. H. Olsson, J. G. Fleming, K. E. Wojciechowski, M. S. Baker, M. R. Tuck, "Post-CMOS compatible Aluminum Nitride filters and resonant sensors," IEEE Freq. Ctrl. Symp. 2007, 412-419.