A 12 MHz micromechanical bulk acoustic mode oscillator

Sensors and Actuators, A: Physical

Volumn 101, Issue 1-2, 2002, Pages 1-9

  Mattila, T ^a   Kiihamaki J ^a   Lamminmaki T ^b   Jaakkola, O ^a   Rantakari, P ^b   Oja, A ^a   Seppa H ^a   Kattelus, H ^a   Tittonen, I ^b  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

^b AALTO UNIVERSITY   (Finland)

Author keywords

Bulk acoustic wave; Electromechanical coupling; Micromechanical resonator; Oscillator noise

Indexed keywords

ACOUSTIC BULK WAVE DEVICES; AMPLIFIERS (ELECTRONIC); ELECTRIC CONNECTORS; ELECTRIC FREQUENCY MEASUREMENT; OSCILLATORS (MECHANICAL); RESONANCE; RESONATORS; SILICON; SPECTRUM ANALYSIS; SPURIOUS SIGNAL NOISE; VOLTAGE MEASUREMENT;

BULK ACOUSTIC MODE OSCILLATOR; ELECTROMECHANICAL COUPLING; ELECTROSTATIC COUPLING; HIGH SPECTRAL PURITY OSCILLATOR; LOW NOISE PREAMPLIFIER; MICROMECHANICAL OSCILLATOR; OSCILLATOR NOISE; PHASE NOISE; SILICON MICROMECHANICAL RESONATOR; SILICON MICROMECHANICS;

MICROELECTROMECHANICAL DEVICES;

EID: 0037201884     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00204-2     Document Type: Article

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