1.51-GHz Nanocrystalline diamond micromechanical disk resonator with material-mismatched isolating support

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2004, Pages 641-644

  Wang, Jing ^a   Butler, James E ^b   Feygelson, Tatyana ^c   Nguyen, Clark T C ^a  

^a University of Michigan   (United States)

^b NAVAL RESEARCH LABORATORY   (United States)

^c SCIENCE APPLICATIONS INTERNATIONAL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTAL STRUCTURE; DIAMONDS; ELECTRONIC EQUIPMENT; FREQUENCIES; QUARTZ; RESONATORS;

CHANNEL-SELECT FILTERS; IMPEDANCE MISMATCH; MICROMECHANICAL DISK RESONATORS;

NANOSTRUCTURED MATERIALS;

EID: 3042742341     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

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