Quality factor enhancement in micromechanical resonators at cryogenic temperatures

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 1445-1448

  Li, Wei Chang ^a   Lin, Yang ^a   Kim, Bongsang ^a   Ren, Zeying ^a   Nguyen, Clark T C ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Cryogenic cooling; Filter; Loss; Oscillator; Quality factor; Resonator; RF MEMS; Wireless communications

Indexed keywords

CRYOGENIC COOLING; FILTER LOSS; QUALITY FACTORS; RF-MEMS; WIRELESS COMMUNICATIONS;

ACTUATORS; BANDPASS FILTERS; COOLING; CRYOGENICS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSYSTEMS; MICROWAVE FILTERS; PHONONS; PIEZOELECTRIC TRANSDUCERS; POLYSILICON; Q FACTOR MEASUREMENT; RESONATORS; TEMPERATURE; THERMOELECTRICITY; WINE; WIRELESS TELECOMMUNICATION SYSTEMS;

SOLID-STATE SENSORS;

EID: 71449110830     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285815     Document Type: Conference Paper

References (18)

1. Y.-W. Lin, et al., "Low phase ...," IEDM, 2005, pp. 287-290.
2. S.-S. Li, et al, "ìmechanical ...," MEMS'04, pp. 821-824.
3. N. Slawsby, "Frequency control ...," FCS'94, pp. 633-640.
4. V. B. Braginsky, et al., Systems with Small Dissipation. Chicago IL: Univ. of Chicago Press, 1985.
5. C. T.-C. Nguyen, et al., "Microresonator ...," Dig. of Tech. Papers, TRANSDUCERS'93, 1993, pp. 1040-1043.
6. th Int. Cryocoolers Conf., 2009.
7. A. Gross, et al., "A multistage ...," MEMS'08, pp. 840-843.
8. B. Kim, et al., "Temperature dependency of quality factor ...," J. MEMS, Vol. 17, No. 3, 2002, pp. 755-766.
9. W. E. Newell, "Miniaturization of tuning forks," Science, vol. 161, no. 3848, pp. 1320-1326, Sep. 1968.
10. C. Zener, "Internal friction...," Phys. Rev., vol.53, no. 1, pp. 90-99, Jan. 1938.
11. H. E. Bömmel, et al., "Excitation ...," Phys. Rev., vol. 117, no. 5, pp. 1245-1252, Mar. 1960.
12. W. P. Mason, Physical Acoustics Principles and Methods. New York: Academic Press, 1964.
13. D. S. Bindel, et al., "Anchor ...," MEMS'05, pp. 133-136.
14. S. A. Chandorkar, et al., "Limits ...," MEMS'08, pp.74-77.
15. R. A. Johnson, Mechanical Filters in Electronics. New York, NY: Wiley, 1983.
16. Y.-W. Lin, et al., "Quality factor ...," Dig. of Tech. Papers, TRANSDUCERS'07, 2007, pp. 2453-2456.
17. A. D. McConnell, et al., "Thermal conductivity ...," IEEE J. MEMS, vol. 10, no. 3, pp. 360-369, 2001.
18. P. Flubacher, et al., "The heat capacity ...," Philos. Mag., vol. 4, pp. 273-294, 1959.