-
2
-
-
0036544038
-
14 MHz micromechanical oscillator
-
Apr.
-
T. Mattila, O. Jaakkola, J. Kiihamäki, J. Karttunen, T. Lamminmäki, P. Rantakari, A. Oja, H. Seppä, H. Kattelus, and I. Tittonen, "14 MHz micromechanical oscillator," Sensors and Actuators A, vol. 97-98, pp. 497-502, Apr. 2002.
-
(2002)
Sensors and Actuators A
, vol.97-98
, pp. 497-502
-
-
Mattila, T.1
Jaakkola, O.2
Kiihamäki, J.3
Karttunen, J.4
Lamminmäki, T.5
Rantakari, P.6
Oja, A.7
Seppä, H.8
Kattelus, H.9
Tittonen, I.10
-
3
-
-
0036122670
-
Stiffness-compensated temperature-insensitive micromechanical resonators
-
Las Vegas, Nevada, 20-24 Jan.
-
W. T. Hsu and C. T. C. Nguyen, "Stiffness-compensated temperature-insensitive micromechanical resonators," in IEEE Int. Micro Electro Mechanical Systems Conf, Las Vegas, Nevada, 20-24 Jan. 2002, pp. 731-734.
-
(2002)
IEEE Int. Micro Electro Mechanical Systems Conf
, pp. 731-734
-
-
Hsu, W.T.1
Nguyen, C.T.C.2
-
4
-
-
0037201884
-
12 MHz micromechanical bulk acoustic mode oscillator
-
Sept.
-
T. Mattila, J. Kiihamäki, T. Lamminmäki, O. Jaakkola, P. Rantakari, A. Oja, H. Seppä, H. Kattelus, and I. Tittonen, "12 MHz micromechanical bulk acoustic mode oscillator," Sensors and Actuators A, vol. 101, no. 1-2, pp. 1-9, Sept. 2002.
-
(2002)
Sensors and Actuators A
, vol.101
, Issue.1-2
, pp. 1-9
-
-
Mattila, T.1
Kiihamäki, J.2
Lamminmäki, T.3
Jaakkola, O.4
Rantakari, P.5
Oja, A.6
Seppä, H.7
Kattelus, H.8
Tittonen, I.9
-
5
-
-
7244239515
-
Nonlinear limits for single-crystal silicon microresonators
-
Oct.
-
V. Kaajakari, T. Mattila, A. Oja, and H. Seppä, "Nonlinear limits for single-crystal silicon microresonators," J. Microelectromech. Syst., vol. 13, no. 5, pp. 715-724, Oct. 2004.
-
(2004)
J. Microelectromech. Syst.
, vol.13
, Issue.5
, pp. 715-724
-
-
Kaajakari, V.1
Mattila, T.2
Oja, A.3
Seppä, H.4
-
6
-
-
52649124720
-
Square-extensional mode single-crystal silicon micromechanical RF-resonator
-
Boston, MA, 8-12 Jun.
-
V. Kaajakari, T. Mattila, A. Oja, J. Kiihamäki, H. Kattelus, M. Koskenvuori, P. Rantakari, I. Tittonen, and H. Seppä, "Square- extensional mode single-crystal silicon micromechanical RF-resonator," in Transducers'03, The 12th International Conference on Solid-State Sensors and Actuators, Boston, MA, 8-12 Jun. 2004, pp. 951-954.
-
(2004)
Transducers'03, the 12th International Conference on Solid-state Sensors and Actuators
, pp. 951-954
-
-
Kaajakari, V.1
Mattila, T.2
Oja, A.3
Kiihamäki, J.4
Kattelus, H.5
Koskenvuori, M.6
Rantakari, P.7
Tittonen, I.8
Seppä, H.9
-
7
-
-
1942424160
-
Square-extensional mode single-crystal silicon micromechanical resonator for low phase noise oscillator applications
-
Apr.
-
V. Kaajakari, T. Mattila, A. Oja, J. Kiihamäki, and H. Seppä, "Square-extensional mode single-crystal silicon micromechanical resonator for low phase noise oscillator applications," IEEE Electron Device Lett., vol. 25, no. 4, pp. 173-175, Apr. 2004.
-
(2004)
IEEE Electron Device Lett.
, vol.25
, Issue.4
, pp. 173-175
-
-
Kaajakari, V.1
Mattila, T.2
Oja, A.3
Kiihamäki, J.4
Seppä, H.5
-
8
-
-
10444237999
-
Series-resonant VHP micromechanical resonator reference oscillators
-
Dec.
-
Y.-W. Lin, S. Lee, S.-S. Li, Y. Xie, Z. Ren, and C. T.-C. Nguyen, "Series-resonant VHP micromechanical resonator reference oscillators," IEEE J. Solid-State Circuits, vol. 39, no. 12, pp. 2477-2491, Dec. 2004.
-
(2004)
IEEE J. Solid-state Circuits
, vol.39
, Issue.12
, pp. 2477-2491
-
-
Lin, Y.-W.1
Lee, S.2
Li, S.-S.3
Xie, Y.4
Ren, Z.5
Nguyen, C.T.-C.6
-
9
-
-
4243144936
-
Long-term stability of single-crystal silicon microresonators
-
Sept.
-
M. Koskenvuori, T. Mattila, A. Häärä, J. Kiihamäki, I. Tittonen, A. Oja, and H. Seppä, "Long-term stability of single-crystal silicon microresonators," Sensors and Actuators A. vol. 115, no. 1, pp. 23-27. Sept. 2004.
-
(2004)
Sensors and Actuators A
, vol.115
, Issue.1
, pp. 23-27
-
-
Koskenvuori, M.1
Mattila, T.2
Häärä, A.3
Kiihamäki, J.4
Tittonen, I.5
Oja, A.6
Seppä, H.7
-
10
-
-
27544480377
-
Stability of wafer level vacuum encapsulated single-crystal silicon resonators
-
Jun. 5-9
-
V. Kaajakari, J. Kiihamäki, A. Oja, H. Seppä, S. Pietikäinen, V. Kokkala, and H. Kuisma, "Stability of wafer level vacuum encapsulated single-crystal silicon resonators," in Transducers'05, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, Jun. 5-9 2005.
-
(2005)
Transducers'05, the 13th International Conference on Solid-state Sensors, Actuators and Microsystems
-
-
Kaajakari, V.1
Kiihamäki, J.2
Oja, A.3
Seppä, H.4
Pietikäinen, S.5
Kokkala, V.6
Kuisma, H.7
-
11
-
-
27544505356
-
Fabrication of single crystal silicon resonators with narrow gaps
-
Jun. 5-9
-
J. Kiihamäki, V. Kaajakari, H. Luoto, H. Kattelus, M. Yli-Koski, and P. Rantakari, "Fabrication of single crystal silicon resonators with narrow gaps," in Transducers'05, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, Jun. 5-9 2005.
-
(2005)
Transducers'05, the 13th International Conference on Solid-state Sensors, Actuators and Microsystems
-
-
Kiihamäki, J.1
Kaajakari, V.2
Luoto, H.3
Kattelus, H.4
Yli-Koski, M.5
Rantakari, P.6
-
13
-
-
0023362111
-
High-performance crystal oscillator circuits: Theory and application
-
June
-
E. Vittoz, M. Degrauwe, and S. Bitz, "High-performance crystal oscillator circuits: Theory and application," IEEE J. Solid-State Circuits, vol. 23, no. 3, pp. 774-783, June 1988.
-
(1988)
IEEE J. Solid-state Circuits
, vol.23
, Issue.3
, pp. 774-783
-
-
Vittoz, E.1
Degrauwe, M.2
Bitz, S.3
-
14
-
-
84857080519
-
Phase noise in capacitively coupled micromechanical oscillators
-
submitted
-
V. Kaajakari, J. K. Koskinen, and T. Mattila, "Phase noise in capacitively coupled micromechanical oscillators," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., submitted.
-
IEEE Trans. Ultrason., Ferroelect., Freq. Contr.
-
-
Kaajakari, V.1
Koskinen, J.K.2
Mattila, T.3
|