High-Q bulk-mode SOI square resonators with straight-beam anchors

Journal of Micromechanics and Microengineering

Volumn 19, Issue 1, 2009, Pages

  Khine, L ^a   Palaniapan, M ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ANCHORS; MICROELECTROMECHANICAL DEVICES; OPTICAL COMMUNICATION; Q FACTOR MEASUREMENT;

AIR DAMPING; AMBIENT PRESSURES; ANCHOR SUPPORTS; BULK MODES; DC BIAS; DC DRIVES; LINEAR MODES; MOTIONAL RESISTANCES; MULTI-USER MEMS PROCESS; NON-LINEAR REGIMES; POWER HANDLINGS; POWER-HANDLING CAPABILITIES; Q VALUES; QUALITY FACTORS; SIGNAL TO NOISE; SILICON ON INSULATORS; SQUARE RESONATORS; VACUUM PRESSURES;

RESONATORS;

EID: 62649175238     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/1/015017     Document Type: Article

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