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Applied Physics Letters

Volumn 74, Issue 20, 1999, Pages 3032-3034

Properties of aluminum nitride thin films for piezoelectric transducers and microwave filter applications

(2) Dubois, Marc Alexandre a Muralt, Paul a

a EPFL (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; FILM GROWTH; MAGNETRON SPUTTERING; MICROWAVE FILTERS; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; PYROELECTRICITY; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTING SILICON; SINGLE CRYSTALS; SPUTTER DEPOSITION; SUBSTRATES;

ALUMINUM NITRIDE; REACTIVE MAGNETRON SPUTTERING;

SEMICONDUCTING FILMS;

EID: 0032615192 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.124055 Document Type: Article

Times cited : (402)

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