An oscillator circuit for electrostatically driven silicon-based one-port resonators

Sensors and Actuators, A: Physical

Volumn 52, Issue 1-3, 1996, Pages 179-186

  Bienstman, Jan ^a   Tilmans, Harrie A C ^a   Peeters, Erik J E A ^a   Steyaert, Michiel ^a   Puers, Robert ^a  

^a UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

Electrostatic excitation and detection; Equivalent circuits; Hard spring effect; Oscillation criteria; Oscillator circuits; Silicon resonators

Indexed keywords

CMOS INTEGRATED CIRCUITS; CRYSTAL OSCILLATORS; ELECTROSTATICS; EQUIVALENT CIRCUITS; INTEGRATED CIRCUIT LAYOUT; TRANSCONDUCTANCE;

OSCILLATOR CIRCUITS; RESONANT SENSORS; RESONANT STRAIN GAGES; SILICON RESONATORS;

SENSORS;

EID: 0030100702     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(96)80146-4     Document Type: Article

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