Design, realization and testing of micro-mechanical resonators in thick-film silicon technology with postprocess electrode-to-resonator gap reduction

Journal of Micromechanics and Microengineering

Volumn 13, Issue 1, 2003, Pages 134-140

  Galayko, Dimitri ^a   Kaiser, Andreas ^a   Buchaillot, Lionel ^a   Legrand, Bernard ^a   Collard, Dominique ^b   Combi, Chantal ^c  

^a Institut Superieur de l'Electronique et du Numerique   (France)

^b UNIVERSITY OF TOKYO   (Japan)

^c STMICROELECTRONICS   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CURRENTS; ELECTRIC POTENTIAL; ELECTRODES; ETCHING; NATURAL FREQUENCIES; RESONATORS; TRANSDUCERS;

MICRO-RESONATORS;

THICK FILMS;

EID: 0037231433     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/13/1/319     Document Type: Article

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