Voltage-tunable piezoelectrically-transduced single-crystal silicon micromechanical resonators

Sensors and Actuators, A: Physical

Volumn 111, Issue 1, 2004, Pages 71-78

  Piazza, Gianluca ^a   Abdolvand, Reza ^a   Ho, Gavin K ^a   Ayazi, Farrokh ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

MEMS; Piezoelectric film; Single crystal silicon; SOI substrate; Voltage tunable resonator

Indexed keywords

ACTUATORS; CAPACITANCE; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRIC TRANSDUCERS; SILICON; SILICON ON INSULATOR TECHNOLOGY; SINGLE CRYSTALS; TUNING;

MICROMECHANICAL RESONATORS; QUALITY FACTOR;

CRYSTAL RESONATORS;

EID: 0442296263     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2003.10.021     Document Type: Conference Paper

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