Composite flexural-mode resonator with controllable turnover temperature

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2007, Pages 199-202

  Melamud, Renata ^a   Kim, Bongsang ^a   Hopcroft, Matthew A ^a   Chandorkar, S ^a   Agarwal, M ^a   Jha, C M ^a   Kenny, T W ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MEMS; SILICA; SILICON WAFERS; SINGLE CRYSTALS; TUNING;

DOUBLE-ENDED TUNING FORKS; FREQUENCY VARIATION; INHERENT FREQUENCIES; SINGLE CRYSTAL SILICON; TEMPERATURE COMPENSATION; TEMPERATURE SENSITIVITY; TUNING-FORK RESONATORS; TURNOVER TEMPERATURES;

RESONATORS;

EID: 52149120930     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.2007.4433054     Document Type: Conference Paper

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