High-performance polycrystalline diamond micro- and nanoresonators

Journal of Microelectromechanical Systems

Volumn 17, Issue 2, 2008, Pages 473-482

  Sepúlveda, Nelson ^a   Lu, Jing ^b   Aslam, Dean M ^b   Sullivan, John P ^c  

^a UNIVERSITY OF PUERTO RICO   (Puerto Rico)

^b Michigan State University   (United States)

^c SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Energy dissipation; MEMS cantilever beams; Polycrystalline diamond MEMS resonator; Quality factor; RFMEMS

Indexed keywords

BORON-DOPED; CANTILEVER RESONATORS; IN VACUUMS; NANO-RESONATORS; POLYCRYSTALLINE DIAMOND MEMS RESONATOR; POLYCRYSTALLINE FILMS; Q-VALUES; QUALITY FACTOR; RESONANCE FREQUENCIES; RESONATOR DIMENSIONS; RFMEMS; TEMPERATURE CO-EFFICIENT; TEMPERATURE RANGES; THERMALLY ACTIVATED; YOUNG'S MODULUS;

ATOMIC FORCE MICROSCOPY; BANDPASS FILTERS; BORON; CANTILEVER BEAMS; DIAMOND FILMS; DIAMONDS; ELECTRON ENERGY LOSS SPECTROSCOPY; ENERGY DISSIPATION; ENERGY DISSIPATORS; MEMS; NANOCANTILEVERS; NATURAL FREQUENCIES; Q FACTOR MEASUREMENT; RESONATORS;

MICROELECTROMECHANICAL DEVICES;

EID: 64649100619     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2008.918409     Document Type: Article

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