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Volumn , Issue , 2005, Pages 5461-5464

A two-chip, 4-MHz, microelectromechanical reference oscillator

Author keywords

[No Author keywords available]

Indexed keywords

BIAS CIRCUITS; BIAS GENERATORS; CMOS AMPLIFIERS; CMOS PROCESS; COMPENSATION CIRCUITRY; FINE TUNING; LOW-PHASE-NOISE; MICRO-ELECTRO-MECHANICAL; MICROMECHANICAL RESONATOR; PACKAGE LEVELS; QUALITY FACTORS; REFERENCE OSCILLATORS; TEMPERATURE COMPENSATION; TEMPERATURE DRIFTS; TUNABILITY;

EID: 33750143022     PISSN: 02714310     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISCAS.2005.1465872     Document Type: Conference Paper
Times cited : (18)

References (8)
  • 1
    • 0041886902 scopus 로고    scopus 로고
    • High-Q single crystal silicon HARPSS capacitive beam resonators with self-aligned sub-100nm transduction gaps
    • August
    • S. Pourkamali, A. Hashimura, R. Abdolvand, G. K. Ho, A. Erbil, and F. Ayazi, "High-Q single crystal silicon HARPSS capacitive beam resonators with self-aligned sub-100nm transduction gaps", IEEE/ASME J. MEMS, vol. 12, no. 4, pp. 487-496, August 2003.
    • (2003) IEEE/ASME J. MEMS , vol.12 , Issue.4 , pp. 487-496
    • Pourkamali, S.1    Hashimura, A.2    Abdolvand, R.3    Ho, G.K.4    Erbil, A.5    Ayazi, F.6
  • 2
    • 10944220857 scopus 로고    scopus 로고
    • VHF Single Crystal Silicon Capacitive Elliptic Bulk-Mode Disk Resonators-Part II: Implementation and Characterization
    • Dec
    • S. Pourkamali, Z. Hao and F. Ayazi, "VHF Single Crystal Silicon Capacitive Elliptic Bulk-Mode Disk Resonators-Part II: Implementation and Characterization," IEEE/ASME J. MEMS, vol. 13, no. 6, pp. 1054-1062, Dec. 2004.
    • (2004) IEEE/ASME J. MEMS , vol.13 , Issue.6 , pp. 1054-1062
    • Pourkamali, S.1    Hao, Z.2    Ayazi, F.3
  • 3
    • 0032265635 scopus 로고    scopus 로고
    • Geometric stress compensation for enhanced thermal stability in micromechanical resonators
    • W. T. Hsu and C. T.-C. Nguyen, "Geometric stress compensation for enhanced thermal stability in micromechanical resonators," Proc. of IEEE Intl. Ultrasonics Symposium, pp. 945-948, 1998.
    • (1998) Proc. of IEEE Intl. Ultrasonics Symposium , pp. 945-948
    • Hsu, W.T.1    Nguyen, C.T.-C.2
  • 4
    • 67649115416 scopus 로고    scopus 로고
    • M. Hopcroft et al, Active temperature compensation for micromachined resonators, Technical Digest, Solid-state Sensor, Actuator and Microsystems Workshop, June 2004, pp. 364-367.
    • M. Hopcroft et al, "Active temperature compensation for micromachined resonators," Technical Digest, Solid-state Sensor, Actuator and Microsystems Workshop, June 2004, pp. 364-367.
  • 5
    • 0016961262 scopus 로고
    • On-chip high-voltage generation in NMOS integrated circuits using an improved voltage multiplier technique
    • June
    • J. Dickson, "On-chip high-voltage generation in NMOS integrated circuits using an improved voltage multiplier technique," IEEE J. Solid-State Circuits, vol. 11, no. 6, pp. 374-378, June 1976.
    • (1976) IEEE J. Solid-State Circuits , vol.11 , Issue.6 , pp. 374-378
    • Dickson, J.1
  • 6
    • 26844472199 scopus 로고    scopus 로고
    • Low- motionalimpedance highly-tunable I2 resonators for temperature-compensated reference oscillators
    • Jan
    • G.K. Ho K. Sundaresan , S. Pourkamali and F. Ayazi "Low- motionalimpedance highly-tunable I2 resonators for temperature-compensated reference oscillators," Proc. of IEEE MEMS 2005, pp. 116-120, Jan 2005.
    • (2005) Proc. of IEEE MEMS 2005 , pp. 116-120
    • Ho, G.K.1    Sundaresan, K.2    Pourkamali, S.3    Ayazi, F.4
  • 7
    • 0033115191 scopus 로고    scopus 로고
    • An integrated high-Q CMOS micromechanical resonator-oscillator
    • April
    • C.T-C. Nguyen and R.T. Howe, "An integrated high-Q CMOS micromechanical resonator-oscillator," IEEE J. Solid-State Circuits, vol. 34, no. 4, pp. 440-455, April 1999.
    • (1999) IEEE J. Solid-State Circuits , vol.34 , Issue.4 , pp. 440-455
    • Nguyen, C.T.-C.1    Howe, R.T.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.