Single-mask reduced-gap capacitive micromachined devices

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2005, Pages 151-154

  Abdolvand, Reza ^a   Ayazi, Farrokh ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; CAPACITANCE; ELECTRIC IMPEDANCE; ETCHING; LITHOGRAPHY; NATURAL FREQUENCIES;

GAP FABRICATION; GAS-REDUCTION TECHNIQUE; RESONATOR STRUCTURES; THICK OXIDE MASK LAYERS;

MICROMACHINING;

EID: 26844548808     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)

1. B. Vakili Amini, et al., "A High Resolution, Stictionless, CMOS Compatible SOI Accelerometer with a Low Noise, Low Power, 0.25μm CMOS Interface", in proceeding of IEEE MEMS'04, Jan. 2004, pp. 572-575
2. S. Pourkamali, et al., "18μm Thick High Frequency Capacitive HARPSS Resonators with Reduced Motional Resistance", in Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head, SC, June 2004, pp. 392-393
3. J. R. Clark, et al., "High-Q VHF Micromechanical Contour-Mode Disk Resonators", IEEE IEDM, San Francisco, California, Dec. 11-13, 2000, pp. 399-402.
4. S. Pourkamali, and F. Ayazi, "Fully Single Crystal Silicon Resonators with Deep-Submicron Dry-Etched Transducer Gaps", IEEE MEMS '04, Jan. 2004, pp 813-816
5. B. Volland, et al., "Dry Etching with Gas Chopping without Rippled Sidewalls", J. Vac. Sci. Technol. B 17(6), Nov./Dec. 1999.
6. M. Chabloz, et al., "Improvement of Sidewall Roughness in Deep Silicon Etching", Microsystem Technologies 6, 2000.
7. C. K. Chung, et al., "High Aspect Ratio Silicon Trench Fabrication by Inductively Coupled Plasma", Microsystem Technologies 6, 2000.
8. M. A. Blauw, et al., "Advanced Time-Multiplexed Plasma Etching of High Aspect Ratio Silicon Structures", J. Vac. Technol. B 20, 2002.
9. M. Puech, et al., "A Novel Plasma Release Process and a Super High Aspect Ratio using ICP Etching for MEMS", SEMICON, Japan, Dec. 2003.
10. S. Pourkamali, et al., "Vertical Capacitive SiBARs", MEMS'05, Miami, 2005.
11. 2 Resonators For Temperature-Compensated Reference Oscilators", MEMS'05, Miami, 2005.
12. Z. Hao et al., "An Analytical Model for Support Loss in Micromachined Beam Resonators with In-plane Flexural Vibrations", Sensors and Actuators A, Vol. 109, Dec. 2003, p.156.
13. Z. Hao and F. Ayazi, "Support Loss in Micromechanical Disk Resonators", MEMS'05, Miami, 2005.