Fragmented membrane MEM bulk lateral resonators with nano-gaps on 1.5μm SOI

ESSDERC 2007 - Proceedings of the 37th European Solid-State Device Research Conference

Volumn 2007, Issue , 2007, Pages 430-433

  Badila Ciressan, N D ^a   Mazza, M ^a   Grogg, D ^a   Ionescu, A M ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; NATURAL FREQUENCIES; QUALITY CONTROL; SILICON ON INSULATOR TECHNOLOGY;

HYBRID MEM CMOS INTEGRATED CIRCUITS; MEM RESONATOR; MOTIONAL RESISTANCE; RESONANCE FREQUENCY;

RESONATORS;

EID: 39549118359     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ESSDERC.2007.4430970     Document Type: Conference Paper

References (8)

1. C.T.-C. Nguyen, R.T. Howe, IEEE JSSCC, vol. 34, April 1999.
2. C.T.-C. Nguyen, Proc. of MRS, vol. 741, 2003.
3. T. Mattila, et al., Proc. IEEE Ultrasonics Symp., 2002, pp. 945-948.
4. N.-D. Badila-Ciressan et al, Springer-Verlag, in press.
5. M. Agarwal et al., IEDM 2005, pp.286-289.
6. V.Kaajakari, et al, J. of MEMS, 2006, pp. 715-724.
7. K.Y.Yasumura et al., J. MEMS, Vol.9, 2000, pp.117-125.
8. A.Olkhovets et al., J.Vac.Sci.Tech. B18.6., 2000, pp.3549-3551.