6MHz bulk-mode resonator-with Q values exceeding one million

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 2445-2448

  Khine, Lynn ^a   Palaniapan, Moorthi ^a   Wong, Wai Kin ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Bulk mode; Differential drive; Micromechanical; Quality factor; Resonators

Indexed keywords

ACTUATORS; MICROSYSTEMS; OPTICAL DESIGN; SENSORS; TRANSDUCERS;

AMBIENT PRESSURES; BULK-MODE; DIFFERENTIAL DRIVE; FULLY DIFFERENTIAL; INTERNATIONAL CONFERENCES; MICROMECHANICAL; Q VALUES; QUALITY FACTOR; SOLID-STATE SENSORS; VACUUM PRESSURE;

RESONATORS;

EID: 47249166370     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300665     Document Type: Conference Paper

References (10)

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